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发明名称
METHOD FOR REMOVING CONTAMINATION WITH FLUORINATED COMPOSITIONS
摘要
申请公布号
EP2179440(A4)
申请公布日期
2011.03.09
申请号
EP20080755076
申请日期
2008.05.06
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
OLSON, ERIK D.;CLARK, PHILIP G.
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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