SEMICONDUCTOR NANOWIRES ARRAY AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A semiconductor nanowire array and a method for manufacturing the same are provided to form a vertically aligned silicon nanowire array in large scale by preventing non-uniform etching of silicon and the defects of nanowire. CONSTITUTION: A method for a semiconductor nanowire array contains the following: A porous metal thin film(40) is formed on one side of a template with a plurality of pores by depositing metal. The template is etched to separate the porous metal thin film. The porous metal thin film is transferred to one side of a silicon substrate. Nanowire(70) is formed using a silicon etching solution etching the silicon substrate.