MASKLESS LITHOGRAPHY USING RASTERIZATION OF MASSIVE POLYGONS

摘要

PURPOSE: A maskless exposure method using rasterization of massive polygons is provided to efficiently transmit data by transmitting only the information with an event to change the operation state of point light. CONSTITUTION: A substrate is exposed by using a lot of point light(12). A repeated pattern instance is extracted from an inputted pattern. Slabs are generated by dividing a polygon(20) of the pattern instance in parallel to a scan direction. Scan pieces that are sections for turning on the point light are calculated from the slabs every scan line(13) through which the point light passes in the pattern instance. Scan data with the position information of the scan pieces is generated.