| 摘要 |
PURPOSE: An optical inspection apparatus and an inspection method using the apparatus are provided to inspect a defect of transparent pattern on an object by using short-wave laser beams, thereby improving inspection efficiency. CONSTITUTION: An optical inspection apparatus comprises a support unit(100) in which an object is placed, a first illumination unit(501) which generates a first short-wave laser beam to illuminate the object placed on the support unit, and an imaging unit(200) which photographs the object illuminated with the first short-wave laser beam.
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