Apparatus for supplying gas,申请号KR20080047428-传众专利搜索

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发明名称	Apparatus for supplying gas
摘要
申请公布号	KR101019953(B1)	申请公布日期	2011.03.09
申请号	KR20080047428	申请日期	2008.05.22
申请人		发明人
分类号	H01L21/205;H01L21/02;H01L21/302	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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