发明名称 SPUTTERING TARGETS AND METHODS FOR DEPOSITING A FILM CONTAINING TIN AND NIOBIUM
摘要 <p>Sputtering targets and sputtering methods for depositing a film that includes tin and niobium. Substrates bearing coatings comprising tin and niobium, for example, low-emissivity coatings including blocker films comprising tin and niobium, or solar control coatings (e.g., conductive oxide coatings) including tin and niobium methods of manufacturing sputtering targets comprising tin and niobium.</p>
申请公布号 EP2293320(A2) 申请公布日期 2011.03.09
申请号 EP20100179524 申请日期 2006.11.29
申请人 CARDINAL CG COMPANY 发明人 HARTIG, KLAUS
分类号 H01J37/34;C03C17/06;C03C17/09;C03C17/22;C03C17/245;C03C17/34;C03C17/36;C03C17/40;C23C4/12;C23C14/34;C23C14/35;E06B3/67 主分类号 H01J37/34
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