| 摘要 |
<p>A micromechanical pressure sensing device comprises a silicon support structure, which is configured to provide a plurality of silicon support beams. The device further comprises one or more diaphragms attached to and supported by the support beams, and at least one piezoresistive sensing device, which is buried in at least one of the support beams. The piezoresistive sensing device is arranged to sense a strain induced in the silicon support structure, said strain being induced by a fluid in contact, in use, with the one or more diaphragms, in order to determine the pressure acting on the one or more diaphragms.</p> |
