MOVABLE STRUCTURE AND MICRO-MIRROR ELEMENT USING THE SAME

摘要

In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units 3 of ladder shape with honeycombed portions 3c are formed by twin supporting rods 3a and crosspieces 3b bridged between the twin supporting rods 3a so as to support the moving plate 2 rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units 3 by the honeycombed portions 3c of the hinge units 3.