发明名称 Pressure sensor device
摘要 A semiconductor pressure sensor for a pressure sensor device has a pressure detection element which includes a membrane made of semiconductor material, particularly silicon. The sensor includes a support having a three-dimensional body passed through by a detection passage. The detection element is made integral with a first end face of the three-dimensional body, substantially at a respective end of the detection passage. The support is configured to serve the function of a mechanical and/or hydraulic adaptor or interface, with the aim of mounting the sensor into a pressure sensor device, particularly to allow mounting the pressure sensor into a pressure sensor device configured for mounting a sensor of the type referred to as monolithic or ceramic.
申请公布号 US7900520(B2) 申请公布日期 2011.03.08
申请号 US20090487347 申请日期 2009.06.18
申请人 ELTEK S.P.A. 发明人 COLOMBO PAOLO
分类号 G01L9/00;H01L21/02 主分类号 G01L9/00
代理机构 代理人
主权项
地址