发明名称 Semiconductor device with gate stack structure
摘要 A semiconductor device includes a first conductive layer, a first intermediate structure over the first conductive layer, a second intermediate structure over the first intermediate structure, and a second conductive layer over the second intermediate structure. The first intermediate structure includes a metal silicide layer and a nitrogen containing metal layer. The second intermediate structure includes at least a nitrogen containing metal silicide layer.
申请公布号 US7902614(B2) 申请公布日期 2011.03.08
申请号 US20070862003 申请日期 2007.09.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LIM KWAN-YONG;YANG HONG-SEON;CHO HEUNG-JAE;KIM TAE-KYUNG;KIM YONG-SOO;SUNG MIN-GYU
分类号 H01L29/423 主分类号 H01L29/423
代理机构 代理人
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