GAS FEEDING EQUIPMENTS FOR FABRICATING OPTICAL SEMICONDUCTOR

摘要

PURPOSE: A gas supplying apparatus for manufacturing an optical semiconductor is provided to uniformly maintain the quality of the optical semiconductor by uniformly supplying source gas or atmosphere gas to a reactor. CONSTITUTION: A liquid gas reservoir(20) stores liquid gas to be supplied to a reactor(60). A gas supply line(50) connects the liquid gas reservoir to the reactor. A heating device(30) changes a liquefied state to a gaseous state by heating the liquid gas from the liquid gas reservoir. The heating device includes thermal fluid which is directly contacted with a gas supply line. A gas feed back line(52) is connected from the lower side of the heating device to the liquid gas reservoir.