发明名称 Forming a thin film electric cooler and structures formed thereby
摘要 Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a first plurality of openings through a first surface of a substrate, forming a p-type TFTEC material within the first plurality of openings, forming a second plurality of openings substantially adjacent to the first plurality of openings through the first surface of the substrate, and then forming an n-type TFTEC material within the second plurality of openings.
申请公布号 US7902617(B2) 申请公布日期 2011.03.08
申请号 US20080148316 申请日期 2008.04.18
申请人 INTEL CORPORATION 发明人 BASKARAN RAJASHREE
分类号 H01L43/06 主分类号 H01L43/06
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