发明名称 |
Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure |
摘要 |
A micromechanical structure and a method for producing a micromechanical structure are provided, the micromechanical structure being configured for receiving and/or generating acoustic signals in a medium at least partially surrounding the structure. The structure includes a first counterelement that has first openings and essentially forms a first side of the structure, a second counterelement that has second openings and essentially forms a second side of the structure, and an essentially closed diaphragm disposed between the first counterelement and the second counterelement.
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申请公布号 |
US7902615(B2) |
申请公布日期 |
2011.03.08 |
申请号 |
US20060084477 |
申请日期 |
2006.11.14 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
SCHLOSSER ROMAN;WEISS STEFAN;FISCHER FRANK;SCHELLING CHRISTOPH |
分类号 |
H01L29/84;H04R19/00 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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