发明名称 Implementation of one or more optical waveguides in reduced optical material
摘要 One or more first portions of a reduced optical material wafer are covered with a masking layer that leaves uncovered one or more second portions of the reduced optical material wafer. The reduced optical material wafer is exposed to an oxidizing atmosphere to reverse a reduction of the one or more second portions of the reduced optical material wafer that makes the one or more second portions receptive for implementation of one or more optical waveguides.
申请公布号 US7903920(B2) 申请公布日期 2011.03.08
申请号 US20050097600 申请日期 2005.04.01
申请人 NORTHROP GRUMMAN GUIDANCE AND ELECTRONICS COMPANY, INC. 发明人 GEOSLING CHRISTINE
分类号 H01L21/00;G02B6/12;G02B6/134 主分类号 H01L21/00
代理机构 代理人
主权项
地址