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经营范围
发明名称
Apparatus For Supplying Gas
摘要
申请公布号
KR20110002238(U)
申请公布日期
2011.03.08
申请号
KR20090011251U
申请日期
2009.08.28
申请人
发明人
分类号
H01L21/205;C23C16/00;H01L21/02
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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