| 摘要 |
PURPOSE: A method for using a dummy substrate is provided to suppress the bending of the dummy substrate by making a transfer schedule of the corresponding dummy substrate with regard to a process chamber based on a process schedule. CONSTITUTION: A film formation history about a plurality of dummy substrates is made by a computer(6) based on a process recipe which is executed on a process chamber. The film formation history includes a kind of films and a film thickness. The curvature of the dummy substrate is obtained by the computer based on curvature data(66) and the film formation history of the dummy substrate. A transfer schedule about a process chamber is made based on the process schedule, the curvature data, and the curvature of the dummy substrate.
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