| 摘要 |
PURPOSE: An electric heater for manufacturing a semiconductor is provided to separate a lower heater with a lower heating line from an upper heater, thereby maintenance costs by replacing only the lower heater when the lower heating line has a defect. CONSTITUTION: A lower boundary protrusion(11) is vertically formed on the inner circumference of a lower heater(10). A lower heating line(12) is arranged between lower boundary protrusions. An upper heater is placed on the lower heater. A plurality of fixing plates is formed on the outer circumference of the upper heater. The upper heater is separated from the lower heater by air pressure of a hydraulic cylinder.
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