3 DIMENSION MEMS STRUCTURE AND MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: A 3d MEMS structure equipped and a manufacturing method thereof are provided to accurately control the height of the level formed on the 3d MEMS structure by implementing the patterning or etching process in multiple stages. CONSTITUTION: A first etching mask(210) is deposited on a substrate(200). The substrate is exposed by etching the area of the first etching mask. A groove(H) is formed by partially etching the area of the substrate exposed through the first etching mask. A second etching mask(240) is deposited on the sidewall of the groove.