APPARATUS FOR FORMING A NANO-PATTERN

摘要

PURPOSE: A fine pattern forming apparatus is provided to improve the productivity by shortening the process time by implementing all the processes for forming the fine pattern on the substrate in one apparatus. CONSTITUTION: A first surface processing unit(110) implements the hydrophilic control on one side of a substrate. A second surface processing unit(120) implements the hydrophobic treatment on one side of a stamp. A dispensing unit(130) spreads the photosensitive film on one side of the substrate transferred from the first surface processing unit.