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发明名称
RF POWER DELIVERY SYSTEM IN A SEMICONDUCTOR APPARATUS
摘要
申请公布号
KR20110022084(A)
申请公布日期
2011.03.04
申请号
KR20117001937
申请日期
2009.06.10
申请人
APPLIED MATERIALS, INC.
发明人
CHEN ZHIGANG;RAUF SHAHID;RAMASWAMY KARTIK
分类号
H01L21/3065;H05H1/34
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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