| 摘要 |
<p>PURPOSE: A loader station of a diffusion apparatus for manufacturing a solar cell is provided to realize factory automation through the simplification of the structure of a substrate loading/unloading mechanism. CONSTITUTION: A loader station(80) of a diffusion apparatus for manufacturing a solar cell comprises a boat mount(10) and a transfer unit(70). The transfer unit comprises a head unit, a support frame and a horizontal transfer member. The head unit is coupled to the rear end of the boat mount and lifts the boat mount. The head unit comprises an upper support plate, a lower support plate, and a driving cylinder. The rear end of the boat mount is fixed to the upper support plate. The lower support plate comprises a plurality of guide shafts. The support frame supports the head unit. The horizontal transfer member horizontally moves the support frame back and forth.</p> |
