SUBSTRATE PROCESSING APPARATUS HAVING CHEMICALS SUPPLYING DEVICE

摘要

PURPOSE: A substrate processing apparatus equipped with the chemical solution supplying device is provided to increase the utility of the space by omitting the additional space for installing the chemical supplying device. CONSTITUTION: A body frame(10) is formed in the rectangular shape. A first door(17) is installed in the body frame and opens the receiving portion. A processing unit(30) comprises a first process station(31) and a second process station(32) which are arranged on both sides of the conveying path. A robot arm loads and unloads the substrate into the first process station and the second process station.