TREATING FLUID SUPPLYING MODULE AND TREATING FLUID DISCHARGING APPARATUS WITH THE SAME

摘要

PURPOSE: A treatment liquid supply module and a treatment liquid discharging apparatus including the same are provided to easily remove a particle and a bubble and minimize the blocking of a treatment liquid discharging head. CONSTITUTION: A bubble removing member removes a bubble within treatment liquid supplied from a treatment liquid discharging head(270). A treatment liquid tank stores the treatment liquid. A main body is opened in one side of the treatment liquid. A first sidewall is supplied to an incoming port of the treatment liquid. A pressure control port is connected to a pressure control member.