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发明名称
Structure of test element group for planar capacitor
摘要
申请公布号
KR101017871(B1)
申请公布日期
2011.03.04
申请号
KR20030060586
申请日期
2003.08.30
申请人
发明人
分类号
H01L21/8242
主分类号
H01L21/8242
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代理人
主权项
地址
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