TREATMENT APPARATUS AND METHOD FOR WAFER WASTE WATER

摘要

PURPOSE: A processing apparatus for wafer fabrication wastewater, and a processing method thereof are provided to recycle the fabrication wastewater generated from cutting a wafer. CONSTITUTION: A processing apparatus for wafer fabrication wastewater comprises the following: a wastewater storage tank(10) for storing waste water; a filter unit(20) filtering the wastewater using a hollow fiber separation film; a filtrate storage tank(30) storing filtrate obtained by passing the wastewater through the hollow fiber separation film; and an air compressor for washing the filter unit.