MANUFACTURING METHOD OF METAL OXIDE NANOSTRUCTURE AND ELCTRIC ELEMENT HAVING THE SAME

摘要

PURPOSE: A method for manufacturing a metal oxide nanostructure is provided to control the density and diameter of a seed layer on which a metal oxide nanostructure is formed by controlling a formation area of an amorphous layer. CONSTITUTION: A method for manufacturing a metal oxide nanostructure comprises the steps of: supplying a precursor containing a first metal, a precursor containing a second metal, and oxygen to a substrate; forming a second metal oxide film of an amorphous phase on the substrate; forming first nuclei containing the first metal as a main component and second nuclei containing the second metal as a main component on the substrate; converting the monocrystal first nuclei into seed layers which are mutually distanced and the second nuclei into amorphous layers; and growing a rod selectively formed on the seed layer.