SYSTEM AND METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING EQUIPMENT USING USER INTERFACE,申请号KR20080118516-传众专利搜索

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发明名称	SYSTEM AND METHOD FOR CONTROLLING SEMICONDUCTOR MANUFACTURING EQUIPMENT USING USER INTERFACE
摘要
申请公布号	KR101018840(B1)	申请公布日期	2011.03.04
申请号	KR20080118516	申请日期	2008.11.27
申请人		发明人
分类号	G05B19/418;H01L21/00;H01L21/02	主分类号	G05B19/418
代理机构		代理人
主权项
地址

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