| 摘要 |
<p>A substrate processing system and a group management system are provided to allow coupling with a plurality of substrate processing devices without an increase in the number of the group management devices although the number of substrate processing devices to be coupled is increased by using a configuration information storage device, a plurality of communication devices and a device information storage device. A substrate processing system includes a plurality of substrate processing devices(10-1~10-n) and a group management system(7). The substrate processing devices process a substrate. The group management system is connected to the substrate processing devices. The group management system has a configuration information storage device, a plurality of communication devices and a device information storage device. The configuration information storage device stores configuration information showing connection configuration. The plurality of communication devices communicate with one of the substrate processing devices based on the configuration information. The device information storage device stores information about the substrate processing devices communicating with the communication devices.</p> |
