发明名称 |
INSPECTION DEVICE AND INSPECTION METHOD |
摘要 |
An inspection device for inspecting defects of an inspection object including a light source for irradiating a luminous flux to the inspection object; an optical system for guiding reflected light from the inspection object; a photoelectric image sensor having a plurality of photoelectric cells arranged, for converting the light guided to detection signals; a detection signal transfer unit having channels each constituted by a signal correction unit, a converter and an image formation unit, and corresponding to each of a plurality of regions formed by dividing the photoelectric image sensor, respectively; and an image synthesis unit for forming an image of the surface of the object by synthesizing partial images outputted; the inspection device inspecting defects of the object by processing the synthesized image; whereby it becomes possible to correct a detection signal from said photoelectric cell close to a predetermined reference target value.
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申请公布号 |
US2011051131(A1) |
申请公布日期 |
2011.03.03 |
申请号 |
US20100941432 |
申请日期 |
2010.11.08 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
TANIGUCHI KOICHI;OCHI MASAYUKI;CHIKAMATSU SHUICHI;NOZAWA SHIGEHISA |
分类号 |
G01N21/00;G01B11/24;G01B11/30;G01N21/956;G03F1/84;G06T1/00;H01L21/027;H01L21/66 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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