发明名称 Pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noise
摘要 A pattern generation system includes an optical system and a rotor. The optical system is configured to project a laser image onto an optical scanner. The rotor has a plurality of optical arms arranged at a first angle relative to one another, and further includes the optical scanner. The laser image is sequentially reflected by the optical scanner into each of the plurality of optical arms of the rotor to generate a pattern on a workpiece.
申请公布号 US2011051211(A1) 申请公布日期 2011.03.03
申请号 US20100923088 申请日期 2010.09.01
申请人 MICRONIC MYDATA AB 发明人 WALTHER JONAS;HEDEVAEM TORBJOEM
分类号 G02B26/08 主分类号 G02B26/08
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