发明名称 |
UV IRRADIANCE MONITORING IN SEMICONDUCTOR PROCESSING USING A TEMPERATURE DEPENDENT SIGNAL |
摘要 |
In a UV process tool for semiconductor processing, a temperature-dependent signal may be used as a monitor signal for determining the momentary irradiance of the UV radiation source. Consequently, a fast and reliable monitoring and/or controlling of the irradiance of UV process tools may be accomplished.
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申请公布号 |
US2011053294(A1) |
申请公布日期 |
2011.03.03 |
申请号 |
US20100854995 |
申请日期 |
2010.08.12 |
申请人 |
MAYER ULRICH;SCHEPERS THORSTEN |
发明人 |
MAYER ULRICH;SCHEPERS THORSTEN |
分类号 |
H01L21/66;G21K5/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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