| 摘要 |
A device for generating a radiofrequency plasma, which includes a supply module applying, on an output interface, an excitation signal at a setpoint frequency, adapted for generating a spark at the output of a plasma-generation resonator connected to the output interface of the power module, and a control module supplying the setpoint frequency to the power module upon a command for generating the radiofrequency plasma. The control module is configured to determine an optimal excitation frequency, to adapt the setpoint frequency to the resonance conditions of the device after formation of the spark.
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