摘要 |
A microscope measurement system including: an optical microscope including a microscope body and an objective connected to the microscope body; a chamber including a support mechanism holding an object to be examined therein, the chamber including an opening inserting the objective into the chamber such that the objective is located essentially within the chamber and the microscope body is located essentially outside of the chamber; a sealing mechanism that provides an essentially gas-tight connection between the optical microscope and the chamber such that the chamber is sealed. |