| 摘要 |
A liquid processing apparatus comprises: a second housing 20; a first housing 10 capable of being brought into contact with the second housing 20; a holding part 1 configured to hold an object to be processed W; a rotation driving part 60 configured to rotate the object to be processed W held by the holding part 1; front-side process-liquid supply nozzles 51a and 52a configured to supply a process liquid onto a peripheral portion of a front surface of the object to be processed W held by the holding part 1; and a storage part 23 disposed on a side of a rear surface of the object to be processed W held by the holding part 1, the storage part 23 being configured to store the process liquid having been passed through the object to be processed W. The respective first housing 10 and the second housing 20 can be moved in one direction, so that the first housing 10 and the second housing 20 can be brought into contact with each other and separated apart from each other. |
