| 摘要 |
<p>Disclosed is a defect inspecting apparatus which is provided with: an illuminating optical system which radiates light, under predetermined optical conditions, to a subject to be inspected; a detection optical system, which detects, under predetermined detection conditions, the light which has been radiated by means of the illuminating optical system and scattered from the subject to be inspected, and which obtains image data; and an image processing section provided with a defect candidate detecting section, which detects a defect candidate from each of the plurality of image data obtained by means of the detection optical system under different conditions, and a post-inspection processing section, which integrates the defect candidates of the plurality of image data and determines a defect.</p> |
