| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve device which can circulate and shut off a large amount of fluids. SOLUTION: The valve device 20 comprises a first block 24 connected with an upstream-side air suction pipe 22a connected to a negative chamber 5, a second block 26 connected with a downstream-side air suction pipe 22b connected to a pump 13, first and second shut-off plates 31, 32 which are rotatably arranged between the first and second blocks, and servo motors 33, 34 which rotate the shut-off plates 31, 32, respectively. A plurality of circulation holes 31a, 32a are formed at the shut-off plates 31, 32, respectively, and the two shut-off plates 31, 32 are rotated in reverse directions with respect to each other. COPYRIGHT: (C)2011,JPO&INPIT
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