LAMINATED SUBSTRATE SEPARATING AND ACCOMMODATING DEVICE AND METHOD OF PRODUCING GLASS SUBSTRATES

摘要

A stacked substrate separation loading apparatus includes: a stacked substrate holding holder configured to hold a stacked glass substrate; a cassette configured to load each sheet of glass substrates separated from the stacked glass substrate; a liquid tank in which the stacked substrate holding holder and the cassette are inserted in liquid; a stacked substrate drive unit configured to drive the stacked substrate holding holder; a stacked substrate positioning unit which positions a height position of the uppermost sheet of the stacked glass substrate; a cassette drive unit configured to drive the cassette; a substrate sliding mechanism configured to push out and separate the glass substrates which are the top sheets of the stacked glass substrate; and a cassette position control unit configured to control the cassette drive unit so that a height position of a loading position of the cassette becomes a height position of the glass substrate.