发明名称 WAFER CARRIER
摘要 The present invention relates to a wafer carrier comprising: a pair of side plates, each of which has a top with a hanging hole and an insertion hole; a side support bar which is fixed between side surfaces of the pair of side plates so as to maintain a predetermined space between the side plates, and which has slots formed by protrusions fixed thereto along the inner surface of the side support bar in the lengthwise direction of the side support bar; a lower support bar which is fixed between bottom surfaces of the side plates so as to maintain a predetermined space between the side plates, and which has slots formed by protrusions fixed thereto along the upper surface of the lower support bar in the lengthwise direction of the lower support bar; and a shielding bar which is detachably inserted into the insertion hole, and which has slots formed by protrusions fixed thereto along the lower surface of the shielding bar in the lengthwise direction of the shielding bar. Here, the slot is formed in such a manner that the center between both widthwise ends thereof is lower than both of said widthwise ends.
申请公布号 WO2011025280(A2) 申请公布日期 2011.03.03
申请号 WO2010KR05738 申请日期 2010.08.26
申请人 EM-POWER CO., LTD.;LIM, JONG HYEON;JOUNG, YOUNG-CHUL;YOO, YOUNG JONG;KIM, YEONG KYUN;CHOI, HYUN CHUL 发明人 LIM, JONG HYEON;JOUNG, YOUNG-CHUL;YOO, YOUNG JONG;KIM, YEONG KYUN;CHOI, HYUN CHUL
分类号 H01L21/673;B65D85/38;B65D85/86 主分类号 H01L21/673
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