Method for reprocessing used processing slurries, involves subjecting used processing slurries into carrier fluid, and separating remaining solids by further separation processes and processing tool particles by magnetic separation process

摘要

The method involves subjecting undiluted used processing slurries into carrier fluid i.e. polyethylene glycol, where the slurries contain an abrasive material e.g. silciumcarbid or industrial diamond, as a processing medium. Remaining solids are separated by further separation processes. Processing tool particles are separated by a magnetic separation process, where the separated carrier fluid is cleaned. A separated processing material is gained as a clean material by repeated washing and/or filtration processes. Used saw slurries are reprocessed while sawing silicon ingots. An independent claim is also included for a device for executing a method for reprocessing used processing slurries.