| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a multi-axis angular velocity sensor unit detecting angular velocities corresponding to respective three-axis orthogonal to each other, and to increase productivity by simplifying a measurement process of a detection level in the multi-axis angular velocity sensor unit. <P>SOLUTION: The multi-axis angular velocity sensor unit detecting the angular velocity with the detection axes 7, 8, 9 orthogonal to each other, an axis indicated by (1, 1, 1) in a coordinate system (X, Y, Z) comprising X, Y, Z axes is turned to a rotational axis 24 after arranging sensor elements 1, 2, 3 and an IC 4 inside a package 5. The multi-axis angular velocity sensor unit is rotated to detect the angular velocity of each sensor element 1, 2, 3. The detection result is compared with reference data stored in the IC 4 in advance to set a correction value of the detection level of each sensor element 1, 2, 3. <P>COPYRIGHT: (C)2011,JPO&INPIT |
