CAPACITIVE ELECTROMECHANICAL TRANSDUCER DEVICE AND SENSITIVITY ADJUSTMENT METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a technique for adjusting output signals for the elastic waves of a capacitive electromechanical transducer device such as a CMUT (Capacitive-Michromachined-Ultrasonic-Transducer) by working.

SOLUTION: A capacitive electromechanical transducer device 100 includes cells 102 each of which includes a first electrode 104 and a second electrode 106 disposed facing the first electrode 104 across a gap 105. In the capacitive electromechanical transducer device 100, at least one cell 102 has a worked part 102 on which the working of at least one of the addition and removal of a material is performed.

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