发明名称 ASYMMETRIC EMBEDDED SILICON GERMANIUM FIELD EFFECT TRANSISTOR
摘要 A semiconductor device, an integrated circuit, and method for fabricating the same are disclosed. The semiconductor device includes a gate stack formed on an active region of a silicon-on-insulator substrate. A gate spacer is formed over the gate stack. A source region that includes embedded silicon germanium is formed within the semiconductor layer. A drain region that includes embedded silicon germanium is formed within the semiconductor layer. The source region includes an angled implantation region that extends into the embedded silicon germanium of the source region, and is asymmetric relative to the drain region.
申请公布号 US2011049626(A1) 申请公布日期 2011.03.03
申请号 US20090551804 申请日期 2009.09.01
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 LIN CHUNG-HSUN;LAUER ISAAC;SLEIGHT JEFFREY W.
分类号 H01L29/786;H01L21/336 主分类号 H01L29/786
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