| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device that can adjust horizontal relative positions of two objects with high precision. <P>SOLUTION: The stage device 2 includes a housing 10 where a first object is fixed, a base plate 50 supported by the housing 10, a movable frame 40 disposed on an upper surface of the base plate 50 movably in a horizontal plane, and an actuator 20 configured to position the movable frame 40 in the horizontal plane. In the stage device 2, the housing 10 is provided with a support portion 12 for supporting at least three points on a lower surface of the base plate 50, and a horizontal position reference portion 15 which is abutted on the side surface of the base plate 50. Further, an elastic member 16 which presses the side face of the base plate 50 against the horizontal position reference portion 15 is fitted to the housing. <P>COPYRIGHT: (C)2011,JPO&INPIT |
