METHOD OF MANUFACTURING BOLOMETER MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of manufacturing a bolometer material having a high TCR absolute value near room temperature with a carbon thin film as a material. SOLUTION: The bolometer material is produced by energizing a carbon thin film and performing acid treatment. A method of manufacturing the bolometer material includes: a process for forming a carbon thin film (1); a process for energizing a carbon thin film (2); a process for dipping the energized carbon thin film in an acid solution for acid treatment (3); a process for cleaning the carbon thin film subjected to acid treatment (4); and a process for drying the cleaned carbon thin film after the acid treatment (5). COPYRIGHT: (C)2011,JPO&INPIT