| 摘要 |
PURPOSE: A hydrophobicizing apparatus, a hydrophobicizing method, and a storage medium are provided to supply high concentration hydrophobic gases to a substrate by increasing the efficiency of evaporating a liquid medicine. CONSTITUTION: In a hydrophobicizing apparatus, a hydrophobicizing method, and a storage medium, an evaporation surface heating portion(62) heats an evaporation surface shaping region(65). A medicine liquid supply port(58) supplies a hydrophobic medicine liquid to the surface of the substrate of the evaporation surface shaping region. A gas inlet port introduces carrier gases within a vaporization chamber. An outlet port(68) extracts hydrophobic gases from the vaporization chamber. A processing container performs hydrophobolic process by using extracted hydrophobic gases. |
