| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device which suppresses generation of dust accompanying movement of a movable frame. <P>SOLUTION: The stage device 2 includes a base plate 50 having a flat upper surface, the movable frame 40 floating over the base plate upper surface by a non-contact bearing, and an actuator 20. The actuator 20 has its tip abutted on a side surface of the movable frame 40, and positions the movable frame 40 in a horizontal plane. The tip of the actuator 20 and the side surface of the movable frame 40 are in contact with each other through a rotatable spherical member 23. Rotation of the spherical member 23 suppresses a slide when the movable frame 40 is moved to suppress dust generation due to the slide. <P>COPYRIGHT: (C)2011,JPO&INPIT |
