| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact distance measuring sensor capable of heightening or lowering sensitivity regardless of the size of the distance measuring sensor and preventing increases in the size of a detection part even when an object to be inspected is at a close position. SOLUTION: The distance measuring sensor includes light sources 1 and 2 for irradiating an object to be inspected 3 with approximately parallel light; a volume hologram 4 arranged at a position outside the straight lines connecting the object to be inspected 3 and the light sources 1 and 2 for diffracting light scattered by the object to be inspected 3; photo-detectors 6 and 7 for individually receiving +nth light and -nth light (wherein n is an integer) from among beams of light diffracted by the volume hologram 4; and an arithmetic circuit part 8 for outputting the amount of displacement of the object to be inspected 3 on the basis of output of the photo-detectors 6 and 7. COPYRIGHT: (C)2011,JPO&INPIT
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