发明名称 SENSOR PATTERN ARRANGEMENT STRUCTURE OF MULTISYSTEM MAGNETIC SENSOR AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a sensor pattern arrangement structure of a magnetic sensor capable of inhibiting variations of an offset voltage, and a manufacturing method thereof. SOLUTION: A surface of a substrate 2 includes a plurality of sensor patterns 10 (two of 10a and 10b in this example) having sensor elements assembled in a bridge-like manner (Wheatstone bridge). A first sensor pattern 10a includes magnetic resistances 11 to 14. A second sensor pattern 10b includes magnetic resistances 21 to 24. The magnetic sensor 1 in this embodiment has all reference lines Ka1 to Ka4 and Kb1 to Kb4 of the magnetic resistances 11 to 14 and 21 to 24 obliquely arranged to central lines La and Lb of the substrate 2. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011043436(A) 申请公布日期 2011.03.03
申请号 JP20090192294 申请日期 2009.08.21
申请人 TOKAI RIKA CO LTD 发明人 ISHIZAKI YOICHI
分类号 G01R33/09;G01D5/18;G01R33/02;H01L43/08 主分类号 G01R33/09
代理机构 代理人
主权项
地址