HALF TONE MASK AND MANUFACTURING METHOD OF THE SAME

摘要

The present invention relates to a half tone mask and a manufacturing method of the same configured to reduce the number of half permeation materials having a multi half permeation part and the number of processes, thereby reducing the manufacturing cost, wherein the half tone mask comprises: a substrate; a transmissive area formed on the substrate for transmitting irradiated light of a predetermined wavelength; a half permeation area formed on the substrate with a plurality of layers alternatively stacked with two or more half permeation materials, and having a half permeation area formed with a multi half permeation part having a different transmittance according to the number of stacked half permeation materials, and a blocking area having a blocking layer formed at on a plurality of half permeation materials that are alternatively stacked.