PERMANENT MAGNET EMBEDED LISITANO ANTENNA FOR LARGE-AREA UNIFORM PLASMA GENERATION

摘要

PURPOSE: A permanent magnet mounted in an antenna for large-area uniform plasma generation is provided to evenly distribute energetic electrons over an antenna by directly mounting a permanent magnet in the antenna. CONSTITUTION: A permanent magnet mounted antenna is comprised of an antenna body(100), a waveguide(300), and a coaxial structure connection unit electrically connecting the waveguide and the antenna. The antenna body is electrically connected to the coaxial structure connection unit through an external conductive connector and an inter conductive connector. The coaxial structure connection unit includes an internal conductor(210), an external conductor, a ceramic insulator, a water-cooled path, and an antenna connector.